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Entegris Type 1 SV-SPF1 Vacuum Filter Technical Specifications
• Product Type: High purity liquid filter cartridge for semiconductor processes
• Filter Class: Type 1 Filter
• Part Number: 78-6969-6211-3
• Product Code: SV-SPF1
• Filter Purpose: Filtration of very small/ultra-fine particles
• Filter Housing: Polypropylene (PP) housing
• Application: Particle filtration of chemical and process fluids requiring high purity
• Filter Structure: High performance filter media for trapping fine particles
• Connection Structure: Cartridge-type inlet/outlet connections integrated into the process line
• Chemical Resistance: High resistance to many process chemicals thanks to the polypropylene housing
• Areas of Application: Semiconductor manufacturing, microelectronics, wafer processes, high purity chemical filtration and sensitive process fluids
• Housing Structure: Closed, single-piece polypropylene filter housing
• Important Note: Disassembly of the filter may void the manufacturer's warranty
